Investigation of Multiple, Large Area EDS Detectors on an SEM Capable of Various Mounting Geometries for Optimal EDS Analysis

It is common knowledge that collecting EDS data with dual large area SDD detectors from 180 degree opposing geometries has proven extremely beneficial with highly topographic samples [REF 1]. Traditionally, using high kV, the high count rates achievable from today’s SDD EDS detectors have been used to significantly reduce the time needed to acquire the statistical data necessary for X-ray analysis and mapping. Moreover, the use of low kV EDS for high spatial resolution analysis with minimized specimen damage has been recently gaining prominence [REF 2, 3]. When low kV microanalysis is performed, there can be a significant contribution from topography variations within the sample that can affect the quality and interpretation of the collected EDS data. Utilization of multiple large area EDS detectors can help alleviate some of these issues. In this paper the benefits of large area collection at low kV will be demonstrated on the next generation SEMs using conditions conducive to minimizing sample damage and contamination and to increasing spatial resolution. We will explore the benefits of multiple geometries with a variety of topographic samples. Special attention will be paid to detector positioning in these analyses and different geometries will be compared.